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Capabilities of Grazing Incidence X-ray Diffraction in the Investigation of Amorphous Mixed Oxides with Variable Composition

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Publications - ISI Article

Capabilities of Grazing Incidence X-ray Diffraction in the Investigation of Amorphous Mixed Oxides with Variable Composition

GIXRD is used to study the composition of mixed amorphous oxides. We consider Ta2O5-SiO2 films of interest as anti-reflection coatings. Subsequently, ellipsometry is performed to correlate their optical properties with GIXRD characteristics and hence with composition.

X-ray diffraction has been extensively utilized to study crystalline materials, but very few studies have explored its potential for amorphous materials. Here, we demonstrate the capabilities of Grazing Incidence X-Ray Diffraction in investigating mixed amorphous oxides. We show that the low-angle scattering characteristics exhibit significant variation with composition.

 

This can be quantified using a linear combination of simple functions, constructing calibration curves. As a case study, we consider Ta2O5-SiO2 amorphous films of interest in photovoltaics as anti-reflection coatings. Optical properties were measured using ellipsometry and correlated with the film composition. The results not only highlight a correlation between the diffraction profile and the composition of amorphous films but also reveal a simple and fast strategy to characterize thin amorphous oxides of industrial interest.

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Rif.RSE​

22003076

Destination​

MDPI Materials, Vol. 15, No 2144, March 15, 2022

Publication Date

15 March 2022

Authors​

E. Achilli, F. Annoni, N. Armani, M. Cornelli, G. Timò (RSE S.p.A.), M. Patrini, P. Ghigna (University of Pavia), L. Celada (University of Parma), M. Micali, A. Terrasi (University of Catania),

Publication Type

ISI Article

Projects

Integrated High Efficiency Photovoltaic Project (Photovoltaics)

Target​

Industrial world Press & Media Research

Related tags

#Industrial sector

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