Page 20 - RSE - Results of the Apollon Project

Results of the APolloN PRoject ANd coNceNtRAtiNg PhotovoltAic PeRsPective

tABLE 2. Metal organic source utilization effciency and total H fow for different MOCVD reactor types
2

Reactor type AiX 200 AiX2400 turbo disk AP-AiX 2800
Wafer area (cm ) 32 405 972 972
2
TMGa utilization effciency (%) 6.83 41.39 15.67 35.87
H total fow (l/min) 10 16.4 100 12.4
2

This drawback is expected, since in order to reduce cross contamination among group-IV and III-V
semiconductor, the gas injector carries the reactant precursors relatively far into the reactor chamber, exposing
them to decomposition temperatures relatively late, thus decreasing the molecule cracking effciency. In spite of this
drawback, the APOLLON reactor confguration allows the carrier gas consumption to be kept very low, in comparison
with other production MOCVD reactors, without compromising the thickness growth uniformity, which has assessed
with Bragg refector growth within 1%.

FiguRE 11. Scheme for Calculating TMGa utilization effciency

5.23 gr/cm 3
GaAs

2.56 gr/cm 3

Effective tMga Ga
utilization
effciency = Q /Q
1 2

With 100%
utilization
Q = tMga effciency
2
(gr/cm ) effectively Q =
3
1
user for depositing 4.22
gaAs gr/cm 3
of tMga

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