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Optical and electrical properties of transparent conductive ultrathin films for electric grid O&M applications

pubblicazioni - Articolo

Optical and electrical properties of transparent conductive ultrathin films for electric grid O&M applications

In questo lavoro sono stati analizzati e da un punto modellistico e sperimentale le prestazioni di Film multistrato trasparenti e conduttivi di ITO (In2O3:SnO2) / metallo / ITO; il film metallico di Ag o di Au e Ti è stato depositato a temperatura ambiente su policarbonato (PC) o su vetro mediante processo di deposizione fisica in fase di vapore a fascio elettronico. Sono stati analizzati spessori multistrato da 40 su a 130 nm. Con questo processo sono state realizzate strutture con elevate conducibilità e trasparenza su fogli di PC flessibile senza la necessità di ricorrere a successivi trattamenti termici ad elevata temperatura.

Generally, low absorption in the wavelength visible range and high electrical conductivity are the two main characteristic that identify an optimal transparent conductive film. However, for some specific applications, further properties are to be considered, as for example the electric field shielding efficiency (e.g. for electromagnetic source confinement/attenuation) or the plasmon resonance position (e.g. for optical sensors). Transparent and conductive films with multilayer ITO (In2O3:SnO2) / metal / ITO structure, where metal = Ag, Au and Ti, have been deposited at room temperature on flexible polycarbonate (PC) and glass substrates by an ion beam assisted electron beam evaporation process. Film thicknesses ranged from 40 up to 130 nm. High conductivity and transparency have been obtained on flexible PC substrate without any thermal treatment after the deposition.

Sheet resistance, optical transmittance, plasmon resonances and electric field shielding efficiency have been measured for several samples with different composition and thickness, showing high quality and interesting performances for specific applications. Data are reported in the present paper. Results demonstrate that the electrical and optical characteristics can be tuned by a proper choice of the composition and thickness of the layers to fulfil the requirements of many applications in the field of electrical components for monitoring and diagnostics, optical sensors, safety clothing, screens and smart devices.

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